Liposome Supported Metallization for Microelectronics

Michael Zwanzig, Stefan Fiedler, and Wolfgang Scheel

Fraunhofer Institute for Reliability and Microintegration IZM, Gustav-Meyer-Allee 25, D-13355 Berlin, Germany




Nanosized, catalytically active Pd-clusters are widely used to initialize electroless metallisation, e.g. for microelectronic circuit fabrication. Usually, they are generated in situ on top of the whole substrate by reduction of a metal precursor and subsequent subtractive structuring. Completely additive metallisa-tion techniques are attractive for minimised cost and shorter process cycle. We present a wet chemical method to produce metal precursors at the surface of dispersed liposomes. That allows to regulate the particle size of the generated Pd-clusters and thus their catalytic activity in a very narrow range. The biomimetic liposome membrane has been varied by additives and corresponding cluster development has been investigated. Optimised cluster preparates have been used for direct print activation of ceramic substrates for subsequent deposition of functional Nickel- and Copper layers.